 |
Large & Inline Ellipsometry SystemsVVRM systemsGeneralized ellipsometer systems are available for measuring the thickness, refractive index, anisotropy, and alignment direction of thin films on glass.Request Info |
Overview
Overview
Due to the AxoScan's high measurement speed of only 0.03 second per Mueller matrix, it is able to perform some ellipsometry measurements that are not possible with other ellipsometers. In particular, AxoScan is used when a large number of locations on large substrates must be tested in order to reduce takt time. Because of its full-Mueller-matrix measurement capability, AxoScan is also useful when measuring anisotropic thin films requiring generalized ellipsometry instead of standard ellipsometry.
All Axometrics production systems are built to comply with each individual customer’s factory common spec, and typically include additional subsystems such as pin-lifters, ionization bars, mechanical and optical gauging, safety interlocks, seismic analysis and restraints, and full CIM software control for automated production measurement and robot sample loading.
Common system sizes include:
- Gen 4 / 4.5 motherglass
- Gen 5 / 5.5 motherglass
- Gen 6 motherglass
- Gen 8 / 8.5 motherglass
Additional sizes are possible, and every system is customized to meet your space requirement.
United States